Fast Library-Building Method for 3D Capacitance Extraction with Variation of Process Parameters

To solve the large time-consuming problem induced by the instability of process in 3D interconnect capacitance extraction,we present an incremental library-building method.Based on the direct boundary element method,this method can re-utilize the previous computation results.In a series of adjacent variation parameter combinations,we just modify a small portion of the coefficients matrix and right hand side of previous combination,and use the previous solution after predictive modification as the iterative initial value of the latter combination’s linear system to extract the capacitance.This method can achieve high precision and good acceleration.