Abstract: A similarity measure method based on the geometry evolution sequence of three-dimensional process model is presented against the criterion that "similar parts structure have similar process" which would result in disadvantages such as big process knowledge granularity.First,we use a group of physical feature vectors which are aff ine-invariant,called shape descriptors,to express the feature value of the three-dimensional process model's geometry;Then,the changed voxels in the process model sequence will be obtained through comparing the difference of the shape descriptors;Next,we build the attribute adjacency graphs of two adjacent process models' geometry evolution by using the changed voxels and use the sequence of the attribute adjacency graph to express the geometry evolution process of the process model;Finally,a novel similarity measure method of machining process is achieved by comparing the sequence's similarity of the attribute adjacency graph.The case results proved the validity of the method.