Abstract: Since most part surface models are established at single scale in product design stage and it is hard to study the influence of part surface topography of practical profile on the product fitting accuracy,a modeling method of part surface topography based on the revised multi-scale altitude field is proposed.Firstly,the micro-topography of a part surface is simulated by normalized fractal characteristic function with processing parameters,and the part surface altitude field is decomposed into varied scales by wavelet analysis,and the multi-scale evaluation of datum planes and texture parameters is carried out.Then the revise and synthesis methods of part surface topography based on multi-scale parameter driving are proposed,so the model of part surface topography is generated,which expresses the part form and meets the multi-scale specifications of roughness,waviness and equivalent flatness.Finally,the efficiency and feasibility of the proposed method is validated by design and analysis of the guide rail of the machine tool.