Abstract: A new method for fast generation of multi-dielectric Green’s function table is proposed.The new method utilizes the symmetric property of multi-dielectric Green’s function table.By inserting virtual homogeneous Neumann boundary inside the transition cube,the original cube with FDM grid imposed is cut down to one fourth of itself,which leads to smaller FDM matrices and faster generation of Green’s function tables.The symmetry of multi-dielectric Green’s function table is proved in theory and furthermore a new method for its fast computation is proposed who is implemented in C++and whose efficiency and accuracy are validated through numerical experiments on a server with 32 cores.The experimental results show that the proposed method brings more than 8X speed-up compared to original FDM.Meanwhile,the Green function tables obtained are just as same as the original FDM.With the proposed method,pre-characterization time cost can be significantly reduced in FRW based capacitance extraction for multi-dielectric VLSI structures.